- Conductor Surface Roughness < 0.1µm
- Micro Via Inductance:5.7pH
- Dielectric Constant=2.55 Td = 0.001
- Line width Control: ±1µm
- Dielectric Spacing Control: ±10% |
-
Conductor Surface Roughness < 1.0µm
- Micro Via Inductance:191.1pH
- Dielectric Constant=3.4 Td = 0.013
- Line width Control:±5µm
- Dielectric Spacing Control: ± 45% |